University of Niš, Pedagogical Faculty in Vranje, Partizanska 14, 17500 Vranje, Serbia
Email: [email protected]
In this study, the neuro fuzzy logic selection of the most influential parameters for non-uniformity of polished surface was performed. The influence of three parameters was analyzed: carrier load, thickness and the pads elastic modulus. Adaptive neuro fuzzy logic or ANFIS was used for establishing the nonlinear relationships between the three parameters and the non-uniformity polished surface. Dataset for training and testing procedure was extracted by finite element model. According to the regression models, thickness of pad has the greatest influence on the non-uniformity. Moreover, elastic modulus and pad thickness are the optimal combination of non-uniformity. Results could be useful in the improvement of chemical polishing process.
Wafer, Chemical, Polishing Process, Non-uniformity, Neuro Fuzzy
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