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Adaptive neuro fuzzy determination of impactful factors on non-uniformity of polished surface

Dalibor Petkovic

Corresponding Author:

Dalibor Petkovic


University of Niš, Pedagogical Faculty in Vranje, Partizanska 14, 17500 Vranje, Serbia
Email: [email protected]


In this study, the neuro fuzzy logic selection of the most influential parameters for non-uniformity of polished surface was performed. The influence of three parameters was analyzed: carrier load, thickness and the pads elastic modulus. Adaptive neuro fuzzy logic or ANFIS was used for establishing the nonlinear relationships between the three parameters and the non-uniformity polished surface. Dataset for training and testing procedure was extracted by finite element model. According to the regression models, thickness of pad has the greatest influence on the non-uniformity. Moreover, elastic modulus and pad thickness are the optimal combination of non-uniformity. Results could be useful in the improvement of chemical polishing process.


Wafer, Chemical, Polishing Process, Non-uniformity, Neuro Fuzzy

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Cite This Paper:

Dalibor Petkovic (2019). Adaptive neuro fuzzy determination of impactful factors on non-uniformity of polished surface. Journal of the Institute of Electronics and Computer, 1, 9-16.


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